发明名称 |
FAILURE ANALYZING METHOD, ITS SYSTEM, YIELD RATIO COMPONENT SIMULATION METHOD AND VIRTUAL YIELD RATIO CALCULATING METHOD |
摘要 |
PROBLEM TO BE SOLVED: To provide a system which efficiently performs a failure analysis for a proper product ratio (yield ratio) for a semiconductor chip manufacture by causes. SOLUTION: A chip arrangement on a wafer which is defined at a chip arrangement defining part 5 is decided at a grouping pattern defining part how to group each adjacent chip, and a virtual category map for failure occurrence is generated at a simulation part. Two kinds of yield ratio component which are failures of being randomly generated on the wafer caused by contamination and of being continuously generated caused by a process are calculated at a yield ratio component separating part, by a mathematical logic base by (n) times of an original chip area which integrates each adjacent (n) chips and by a yield ratio of the category map.
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申请公布号 |
JP2001160572(A) |
申请公布日期 |
2001.06.12 |
申请号 |
JP19990342913 |
申请日期 |
1999.12.02 |
申请人 |
HITACHI LTD |
发明人 |
NAKURA KOICHI |
分类号 |
H01L21/66;G11C29/00;G11C29/44;(IPC1-7):H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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