发明名称 SUPPORTING DEVICE, AND ALIGNMENT UNIT
摘要 PROBLEM TO BE SOLVED: To prevent excessive rise and uneven load caused by the inclination of a supported body with respect to a supporting body, and to smoothly position the supported body. SOLUTION: In a supporting device provided with the supporting body A and the supported body B to be slidably driven by each other via a lubricating medium 6, a first electrode 8 is provided on the supporting body A side, and a second electrode 12 facing the first electrode 8 is provided on the supported body B side facing the first electrode 8 with a predetermined space therebetween to detect the change in the space between the electrodes 8 and 12 associated with the inclination of the supported body B with respect to the supporting body A as the change in electrostatic capacity.
申请公布号 JP2001157950(A) 申请公布日期 2001.06.12
申请号 JP19990341042 申请日期 1999.11.30
申请人 NYUURII KK 发明人 ARAI TAKAO
分类号 B23Q17/22;(IPC1-7):B23Q17/22 主分类号 B23Q17/22
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