| 摘要 |
PROBLEM TO BE SOLVED: To provide a performance stabilizing method for a magnetic fluid sealing device, capable of preventing temporal reduction in a vacuum degree in a vacuum range generated during the Vacuum-maintaining operation, by restraining the rapture of a film of magnetic fluid interposed between two ranges between which differential pressure is generated. SOLUTION: Partial pressure of sealing ranges 8 of a magnetic fluid seal device 1, in which a plurality of seal parts for magnetically absorbing magnetic fluid are arranged in an annular clearance and the sealing ranges are formed between respective seal parts, is performed at the second relative rotational speed set higher than the first relative rotational speed in steady operation, and then the steady operation at the first relative rotational speed is performed. |
