| 摘要 |
PROBLEM TO BE SOLVED: To stably control a load applied to an adsorption part to be low by devising a piping route. SOLUTION: A relay chamber 7 is provided between a nozzle 1 to adsorb an article and a vacuum valve 2, a piping hose 5 is provided between the vacuum valve 2 and the relay chamber 7, a piping hose 6 is provided between the nozzle 1 and the relay chamber 7, and the piping hose 6 is horizontally disposed to the nozzle 1. |
