| 摘要 |
PROBLEM TO BE SOLVED: To reduce technical trouble and installation space by improving a suction apparatus provided with a primary filter. SOLUTION: One or more secondary filters 21, 41 are placed in a secondary filter chamber 42a at the outlet side of a primary filter. Filtered air can be supplied from the secondary filter chamber 42a through a suction pipe 03 to a low-pressure source 43. The flow direction at the secondary filters 21, 41 can be reversed under a counter flow to discharge the removed substance attached to the secondary filter from the secondary filter chamber 42a.
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