发明名称 METHOD FOR HEAT-TREATING SEMI-INSULATING GaAs SINGLE CRYSTAL
摘要 PROBLEM TO BE SOLVED: To provide a method for heat-treating a semi-insulating GaAs single crystal, capable of obtaining a high-purity semi-insulating GaAs single crystal having slight contamination of heavy metal without using an expensive specific quartz ampule. SOLUTION: In this method for heat-treating the semi-insulating GaAs single crystal by sealing the semi-insulating GaAs single crystal in the quartz ampule and heating the quartz ampule from the outside, a part of the quartz ampule is provided with a low-temperature zone having <=0.9 heat treatment temperature of the semi-insulating GaAs single crystal and the semi-insulating GaAs single crystal is heat-treated.
申请公布号 JP2001158699(A) 申请公布日期 2001.06.12
申请号 JP19990339155 申请日期 1999.11.30
申请人 HITACHI CABLE LTD 发明人 SEKI MINORU
分类号 H01L21/324;C30B29/42;C30B33/02;(IPC1-7):C30B33/02 主分类号 H01L21/324
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