| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card substrate that can accurately and stably carry out measurement for a long time. SOLUTION: A probe card substrate 20 is composed of a circular probe card substrate body 22 having a square opening 22a at a center, and a number of probe needles 24 being aligned at four sides of the opening. The probe needles are slantingly extended downward from the four sides of the opening toward the inside, and have a tip 24a being bent in nearly a vertical direction. On an end face 24b of the tip, a recessed part 26 is provided, an end face outer edge being formed by the end face of the tip and a side wall 24c is formed as a projection curved part 28 being rounded outward. A vacuum suction tube 30 is supported by a support member 32 and is provided while the vacuum suction tube passes through the opening of the substrate body, and a suction port 30a is provided at the tip of each branch pipe 30b being allowed to branch in a forked shape for positioning near the tip 24a of the probe needle 24.
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