Method and structure for SOI wafers to avoid electrostatic discharge

摘要

A method of dissipating charge from a substrate of an SOI device is provided wherein a charge dissipation path is formed in the device so that it abuts the various layers thereof. Exemplary charge dissipation paths include high conductive materials, resistive means, and field emission or arc discharge means. SOI structures having said charge dissipation path formed therein are also provided. SOI ESD circuits between SOI substrate and chip ground Vss are provided herein.