| 发明名称 |
METHOD AND DEVICE FOR COATING SOLUTION ONTO SUBSTRATE |
| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for applying a substantially uniform coating onto a substrate, and a method using this device. SOLUTION: This device includes a substrate supporting body having a compressive surface. |
| 申请公布号 |
JP2001157865(A) |
申请公布日期 |
2001.06.12 |
| 申请号 |
JP20000264169 |
申请日期 |
2000.08.31 |
| 申请人 |
E I DU PONT DE NEMOURS & CO |
发明人 |
PRINCIPE FRANK SANTO;INNOCENZO JEFFREY GLENN |
| 分类号 |
G03F7/16;B05C1/02;B05C11/02;B05D3/00;G03F3/10 |
主分类号 |
G03F7/16 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
