CAPACITANCE TYPE DISPLACEMENT DETECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To suppress influence of cross talk between a transmission electrode and detection electrodes in a capacitance type sensor. SOLUTION: In this sensor, an electrode part is provided with the transmission electrode 10 and the detection electrodes 12 such that the transmission electrode 10 and the detection electrodes 12 are capacitively coupled with a reception electrode provided in a counter scale. The detection electrodes 12 detect a capacity change between the transmission electrode 10 and the reception electrode caused by displacement. Plural signals each having a different phase are supplied to the transmission electrode 10. Respective signal lines are wired in zigzag in upper and lower layers to equalize distances between the respective signal lines and the detection electrodes 12 and to equalize a cross talk amount to the detection electrodes 12.