发明名称 Buried wiring line
摘要 A buried wiring line. The structure of the buried wiring line at least comprises a conductive doped region in a provided substrate and a silicon nitride region formed around the conductive doped region in the substrate. The silicon nitride region, which comprises a first silicon nitride below the doped region and a second silicon nitride layer beside the doped region, isolates the buried wiring line from the substrate.
申请公布号 US6246116(B1) 申请公布日期 2001.06.12
申请号 US19990316668 申请日期 1999.05.21
申请人 UNITED MICROELECTRONICS CORP. 发明人 LIU TIEN-JUI
分类号 H01L21/768;H01L23/532;(IPC1-7):H01L23/48 主分类号 H01L21/768
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