| 摘要 |
PURPOSE: To prevent the peeling of a surface film by covering the surface of a base material comprising titanium or a titanium alloy with a surface film made of Al2 O3 through an ion mixing layer containing titanium, aluminum and oxygen to increase an adhesion strength between both due to the realization of continuity between the base material and the surface film. CONSTITUTION: An ion mixing layer 4 containing a base material component, aluminum and oxygen is formed on a surface part of a base material 3 comprising titanium or a titanium alloy by an oxygen ion beam mixing action, and then, covered with a surface film 5 made of Al2 O3 . In the formation of the surface film of Al2 O3 , simultaneously with the injection of oxygen ions, collision with the injected ions causes the aluminum and the base material component in the ion mixing layer 4 to be deposited and eventually jammed into the base material. Moreover, moving particles thus jammed undergo a mixing through the collision with the ions. Thus, the ion mixing layer 4 exists also in the surface films of Al2 O3 5 to form an intermediate layer having the aluminum and the base material component mixed. |
