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发明名称
摘要
申请公布号	JP3174796(B2)	申请公布日期	2001.06.11
申请号	JP19920163140	申请日期	1992.06.22
申请人		发明人
分类号	G03F7/20;G21K5/04;H01J37/147;H01J37/305;H01L21/027;(IPC1-7):H01J37/305	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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