发明名称 FACILITY FOR SYNTHESIS OF DIAMOND IN D C GLOW-DISCHARGE PLASMA
摘要 plasma-chemical technology. SUBSTANCE: invention is related to equipment for production of diamonds with the aid of D C glow-discharge under pressure below atmospheric pressure. Main point of technical realization of problem of increased productivity and efficiency of process of growing of diamond lies in mounting of substrate holder for axial movement and in fitting it with substrate heater. Magnetic coil is installed outside discharge chamber and additional power supply source is connected to substrate holder with negative pole and to anode with positive pole. EFFECT: increased productivity and efficiency of process of growing of diamond. 1 dwg
申请公布号 RU2168566(C2) 申请公布日期 2001.06.10
申请号 RU19990115944 申请日期 1999.07.26
申请人 " 发明人 SAMOKHVALOV NIKOLAJ VASIL'EVICH;BONDARENKO SERGEJ PAVLOVICH;KUDRJASHOV O.JU.
分类号 C30B29/04;C01B31/06 主分类号 C30B29/04
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