| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric sensor capable of mutually coinciding with the resonance frequencies of two vibration modes each other and uniforming the vibrating state in each vibration modes. SOLUTION: This piezoelectric sensor comprises vibration driving electrodes 11-14 arranged on the outer circumferential side of the upper surface of a disc- like piezoelectric ceramic substrate 10, vibration detecting electrodes 15-18 arranged on the inner circumferential side thereof, and a weight member 3 arranged in the center of the lower surface of the piezoelectric substrate 10 to detect the Corioils force by a change of angular velocity by use of two different vibration modes. Recessed parts or additional projection parts 31 and 32 for fine control of weight are provided in a plurality of positions on the lower end surface of the weight member 3. |
