发明名称 TAPE-STICKING APPARATUS AND TAPE-STICKING METHOD
摘要 <p>PROBLEM TO BE SOLVED: To provide a tape-sticking apparatus by with which an adhesive tape can be used without waste, to improve the yield and the sticking performance between the adhesive tape and a substrate can be improved. SOLUTION: A tape-sticking apparatus, with which only the adhesive tape 10 of a long tape material 2 composed of the adhesive tape 10 and a pasteboard 9, on which the adhesive tape 10 is stacked, is cut into a prescribed length and stuck to a wafer ring 85 and the substrate 73 has a pressing unit 7, which is placed on a sticking stage 5 and presses the adhesive tape 10 stuck to the wafer ring 85 and the substrate 73 to be stuck tightly.</p>
申请公布号 JP2001156160(A) 申请公布日期 2001.06.08
申请号 JP19990340750 申请日期 1999.11.30
申请人 APIC YAMADA CORP 发明人 YANAGISAWA KUNIKAZU;TABATA YOSHIKAZU;YOSHIZAKO FUMITAKA
分类号 H01L21/683;H01L21/301;H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/683
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