| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an object sensor which can avoid wrong detection, caused by chattering and foams of a treatment solution and incorrect detection caused by crystallization of the treatment solution and provide a substrate treating apparatus which can surely control the conveyance of a substrate. SOLUTION: A sensor 16 or 17, which detects a substrate W has a pendulum member 54 which is displaced by the contact with the substrate W, a permanent magnet 62 attached to the pendulum member 54, a Hall element 66 which is a magnetoelectric transducer which outputs signals according to a magnetic field applied by the permanent magnet 62, a vessel 70 in which a part of the pendulum member 54 and a support shaft 52 are dipped in the solution, a solution supply pipe 81, through which the solution is supplied into the vessel 70 and a drain pipe 82 for keeping the surface level of the solution in the vessel 70 constant.</p> |
