发明名称 METHOD AND APPARATUS FOR DRYING SOLAR CELL SUBSTRATE
摘要 <p>PROBLEM TO BE SOLVED: To provide an apparatus for drying a solar cell substrate capable of preventing adherence of a dust to the substrate by eliminating static electricity generated at the substrate by destaticizing means during a drying step of drying the substrate. SOLUTION: The apparatus for drying the solar cell substrate for drying the substrate by cleaning the substrate A, and then conveying the substrate A into a drying chamber 15 comprises a conveyor 13 for conveying the cleaned substrate A, a drying tank 16 having an air knife 20 provided on the way of the conveyor 13 to spray air to the substrate A to dry the substrate, an ionized air generator 25 as the destaticizing means for removing the static electricity generated at the substrate A, a destaticizing brush 27 and a destaticizing roller 31.</p>
申请公布号 JP2001156308(A) 申请公布日期 2001.06.08
申请号 JP19990338027 申请日期 1999.11.29
申请人 KANEGAFUCHI CHEM IND CO LTD 发明人 HAYASHI NORIYUKI
分类号 H01L31/04;(IPC1-7):H01L31/04 主分类号 H01L31/04
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