| 摘要 |
PROBLEM TO BE SOLVED: To provide a monitoring method and system for impurity concentration capable of continuously and precisely monitoring the concentration of impurities in ultrapure water or process water having an extremely low impurity concentra tion. SOLUTION: This monitoring method and system of impurity concentration comprises capturing impurities in a fluid in a porous membrane having a functional group having ion exchangeable function by passing a prescribed quantity of the fluid to the porous membrane, eluting the captured impurity from the porous membrane to measure the impurity concentration in the eluent, calculating the impurity concentration in the fluid from the measured concentration, and repeating a series of these operations at a prescribed timing, thereby continuously providing the impurity concentration of the fluid.
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