| 摘要 |
PROBLEM TO BE SOLVED: To provide a continuous heating furnace, capable of facilitating mass production, by a method wherein an energy cost is reduced while securing a temperature control accuracy required for the drying and firing of a substrate. SOLUTION: The continuous heating furnace for a substrate is provided with a plurality of heating chambers, having heating means at the upper part and the lower part of the same as well as a transfer means for transferring a matter to be heated into a neighboring heating chamber, and is constituted so as to be capable of effecting pre-heating, temperature raising, even heat retaining and cooling in accordance with a desired temperature curve by controlling the temperatures of respective heating chambers individually so that a substrate temperature enters within a predetermined temperature range. In the heating furnace 30, radiant tube burners 20 are employed for at least one side of the heating means at the upper part and the lower part of respective heating chambers 1-18 while electric heaters 21 are employed for the remaining heating means.
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