| 摘要 |
PROBLEM TO BE SOLVED: To provide a catadioptric projection objective lens, capable of completely correcting chromatic aberrations by a catadioptric objective lens part by which excessive correction is executed. SOLUTION: This objective lens is provided with an objective surface 1, physical beam splitter 500, concave mirror 202, image surface 84, 1st objective lens part 100 arranged between the objective surface 1 and the physical beam splitter 500, 2nd objective lens part 200 arranged between the physical beam splitter 500 and the concave mirror 202, and 3rd objective lens part 300 arranged between the physical beam splitter 500 and the image surface 84, and the 2nd objective lens part 200 includes at least two divergent lenses.
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