发明名称 ENVIRONMENT TEST DEVICE FOR ELECTRONIC COMPONENT
摘要 PROBLEM TO BE SOLVED: To realize compactness and cost reduction for entire device by reducing the number of parts. SOLUTION: This device has a cassette support part 4 for fitting a cassette 2 guided to be moved freely vertically, a heater support part 6 guided to be moved freely vertically, which is positioned above the cassette support part 4 and supports a heater part 5 for heating the upper surface of the cassette 2 to be displaced up freely, a link part 7, etc., for linking the cassette support part 4 and the heater support part 6, so that the cassette support part 4 can be moved vertically in a fixed stroke range S with respect to the heater support part 6, a fixed connection base part 10, which is positioned below the cassette support part 4 and has the other side connector 9, etc., connected to one side connector 8, etc., provided to the cassette 2 and a driving part 11 for vertically moving the heater support part 6.
申请公布号 JP2001156130(A) 申请公布日期 2001.06.08
申请号 JP19990334712 申请日期 1999.11.25
申请人 ORION MACH CO LTD;MATSUSHITA ELECTRIC IND CO LTD 发明人 WAKUI MASAYUKI;NAKAMURA YUMIO;ASANUMA KAZUNORI;EZAWA KATSUKAZU
分类号 G01R31/26;H01L21/66;(IPC1-7):H01L21/66 主分类号 G01R31/26
代理机构 代理人
主权项
地址