FLOW UNINTERRUPTIVE MULTISTAGE MICROFLOW LAMINAR FLOWMETER

摘要

PROBLEM TO BE SOLVED: To provide a passage structure capable of ensuring a precision of about 2% to read value in an air flow measuring range of 0.2-20 L/h and limiting measuring pipe lines to two and never causing zero flow rate even in any case. SOLUTION: In order to ensure the measurement precision of flow rate and a wide measuring range, the differential pressure gauge 10 of a laminar flowmeter 1 is used, a passage is formed of two lines 6 and 7, and an intermittent valve 8 is arranged only on the line 7 having a thick inside diameter, so that the proper differential pressure gauge 10 can be applied.