| 摘要 |
PROBLEM TO BE SOLVED: To provide a chlorine ion sensor reduced in the size and improved in detection accuracy. SOLUTION: On a substrate 1, a substantially comb-shaped platinum electrode 10a formed of a platinum thin film and a substantially comb-shaped silver/silver chloride electrode 10b formed of a silver/silver chloride thin film are arranged face to face so that the electrodes 10a, 10b mesh with each other. Because the electrodes 10a, 10b are formed of thin films respectively, the size of the device can be reduced as a whole. In addition, projection parts 12a, 12b of the electrodes 10a, 10b are arranged alternately with their side faces arranged face to face substantially, so that facing areas of the electrodes 10a, 10b can be widened. Consequently, a current amount flowing between the electrodes 10a, 10b is increased, and detection accuracy can be improved. |
