| 摘要 |
PROBLEM TO BE SOLVED: To improve efficiency of teaching in automatic sorting of defective image for carrying out image sorting, based on data taught in advance and to make the display method of automatic sorting result effective. SOLUTION: A computer supports user judgment, by displaying category candidate when a user rearranges and displays an untaught image group according to similarity degree of an image group designated as the same category or designates an untaught image. An image which is exceptional in a category can be readily found by displaying characteristic amount distribution and each image per category in coordination. Sorting is carried out automatically according to the size of the defect. When an image is picked up through by variable magnification, a display image size is changed and displayed to make the scale on a screen the same. A display method for automatic sorting result, two or more of a wafer map, a category list and defective size distribution are displayed simultaneously, and a plot point on a wafer map is made to change according to a category which is selected by a user and the defect size.
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