| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric sensor capable of preventing the effect of voice noise by setting the driving frequency of a piezoelectric vibrator to 20 kHz or more. SOLUTION: This piezoelectric sensor comprises vibration driving electrodes 11-14 and vibration detecting electrodes 15-18 formed on one main surface of a disc-like piezoelectric ceramic substrate 10 to detect the Coriolis force by a change in angular velocity by use of two different vibration modes. The relation between the diameter D of the vibrating area of the piezoelectric ceramic substrate 10 and the thickness T of the substrate 10 is set to be D<K×T (K is a constant of 26). |
