| 摘要 |
PROBLEM TO BE SOLVED: To provide an integrated ion sensor capable of increasing its accuracy while reducing the size of the sensor as a whole. SOLUTION: A pH sensor 30, a temperature sensor 40, a flow rate sensor 50 are integrated on a base board 1 formed of a silicon substrate provided with a hypochlorous acid ion sensor detecting a hypochlorous acid ion. The hypochlorous acid sensor 20 is provided with a platinum electrode 11 and a silver/silver chloride electrode 10 formed separately from each other on the main surface side of the substrate 1. |
