TEMPERATURE CONPENSATION METHOD AND DEVICE FOR SENSOR OUTPUT

摘要

PROBLEM TO BE SOLVED: To reduce the capacity of a memory means used for temperature compensation in the output of semiconductor pressure sensor having a characteristic changing the output by temperature change. SOLUTION: Temperature characteristics of output of sensor 3 having a temperature characteristic changing the output by temperature change are separated into one or more primary compensation temperature regions and one or more higher degree compensation temperature regions. Temperature of the sensor 3 or the surrounding temperature is measured and a compensation equation proper for each compensation temperature region separated by the measured temperature is read out of a memory means 9. By using the compensation equation read out of the memory means 9 in a compensation operation means 11, the output of the sensor 3 for the temperature change is removed to output.