发明名称 SOLID-STATE IMAGE PICKUP DEVICE AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a solid-state image pickup device in which a lack of uniformity in spectral intensity of the transmitted light due to a lack of uniformity in the thickness of a second insulating film is restrained from occurring, by a method wherein a third insulating film possessed of optical characteristics is interposed between a first and a second insulating film, so as to restrain a conventional light reflecting interface from being formed and its manufacturing method. SOLUTION: Photoelectric conversion devices are formed on a semiconductor substrate, a first insulating film and a second insulating film whose light refractive index is different from that of the first insulating film are provided on the photoelectric conversion devices for the formation of a solid-state image pickup device, where a third insulating film is interposed between the first and second insulating film, and the third insulating film is equipped with a region whose refractive index changes continuously from that of the first insulating film to that of the second insulating film.
申请公布号 JP2001156279(A) 申请公布日期 2001.06.08
申请号 JP19990338448 申请日期 1999.11.29
申请人 CANON INC 发明人 OKUNO TAKEHARU
分类号 H01L21/316;H01L21/318;H01L27/146;H04N5/335;H04N5/365;H04N5/369;H04N5/372;(IPC1-7):H01L27/146 主分类号 H01L21/316
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