| 摘要 |
PROBLEM TO BE SOLVED: To provide a spin processing device wherein treatment liquid is prevented from sticking to the rear surface of the board at a dry process. SOLUTION: This device is provided with a sup body 1, a rotating body 5 that is provided in the cup body to be rotationally driven and further provided with a first support detachably supporting the peripheral part of the board, and a gas nozzle 26 that is placed fixedly facing the center part of a rear surface of the board supported by the rotating body to inject drying gas to the rear surface of the board. An upper end surface of the nozzle is made into a flat surface 31, and the nozzle body is placed and the flat surface is arranged close to the rear surface of the board supported by the rotating body.
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