| 摘要 |
PROBLEM TO BE SOLVED: To provide a constitution, assembly and adjusting method of a direct- viewing, high resolution scanning confocal optical system. SOLUTION: In this confocal optical apparatus with a light source for irradiating a part to be inspected 7 with light, a scanning part 2 for scanning the part to be inspected 7 with light, a light-condensing optical system 4 for condensing the light from the scanning part 2 on to the part to be inspected 7, a protective optical member 6 arranged between the light-condensing optical system 4 and the part to be inspected 7, and a light-detecting part for detecting the light returning from the part to be inspected 7, the protective optical member 6 is arranged with inclination to the optical axis of the light-condensing optical system 4.
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