SEMICONDUCTOR PRESSURE SENSOR AND ITS PRODUCTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor pressure sensor capable of improving sensitivity without enlarging the chip area of the sensor. SOLUTION: In a semiconductor pressure sensor having a diaphragm 2 displaced by pressure and a piezoelectric resistor 3 changing the resistance value by the displacement of the diaphragm 2 and detecting pressure under the variation of the resistance value of the piezoelectric resistance 3, a groove structure 6 is formed in at least either of the piezoelectric resistance 3 forming part of the diaphragm 2 surface or the back surface of the piezoelectric resistance 3 forming part.