| 摘要 |
PROBLEM TO BE SOLVED: To provide a confocal optical scanning prove device capable of preventing breakdown of a scanning mirror. SOLUTION: A confocal optical scanning prove device comprises a prove 1 having a scanning mirror, a controller 2 for driving the scanning mirror as well as controlling start/stop of the drive, an LD 6 for generating light for irradiating a part to be inspected, an optical fiber for guiding the light from the LD 6 to an end of the prove, 1 focusing means for focusing the light from the optical fiber onto the part to be inspected and gathering the light from the part to be inspected onto an end face of the optical fiber, a four-terminal coupler 8 for separating a part of a return light from the part to be inspected from an optical path for a light from a light source, a PMT 7 for detecting the separated light, an imaging device 4 for imaging a signal from the PMT 7, and a monitor 5 for indicating the image, wherein the imaging device 4 smoothly changes amplitude of a driving signal for driving the scanning mirror from a first amplitude to a second amplitude.
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