发明名称 MANUFACTURING METHOD OF DEVICE MODULE
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method of a device module such as an optical module and the like capable of stably mounting chips such as the optical module and the like without damages. SOLUTION: The manufacturing method of the device proceeds with mounting the chip 200 on a mount 300 by means of a transferring means 440 equipped with a chip suction unit 441 in a mounting apparatus 400A. In the method, a cushion means 500A is provided under the mount 300 mounting the chip 200 thereon, or a cushion means 500B is provided on the chip suction unit 441 of the transferring means 440 to which the chip 200 is sucked. By means of the cushion means 500A, B, impact to the chip 200 can be relieved, and the chip 200 can be stably mounted without any damages.
申请公布号 JP2001156084(A) 申请公布日期 2001.06.08
申请号 JP19990333452 申请日期 1999.11.24
申请人 FUJIKURA LTD 发明人 TANAKA KOJI;OSAWA MAKOTO;ISONO YOSHIYA;WATANABE TSUTOMU;IDE TAKEHISA
分类号 H01L21/52;H01L31/02;H01L33/30;H01L33/48;H01S5/022 主分类号 H01L21/52
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