| 摘要 |
<p>PROBLEM TO BE SOLVED: To conduct accurate-positioning without overloading the substrate and without a high-precise position detector and position a substrate with high accuracy. SOLUTION: In a substrate-positioning device in which a substrate is abutted on a positioning member provided in a tool, whereby the substrate is positioned in the tool, this device comprises, a base plate 21 fixed to a robot hand 16a, a substrate-holding air cylinder 22 fixed to a position counter to each side of the base plate 21, and a substrate-holding member 24 connected to each air cylinder. When a substrate 9 abuts on a positioning member 7 so that a load acts on the air cylinder 22, there is provided an adjusting device for adjusting the pushing pressure of the cylinder to be a preset pressure.</p> |
