| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a laser beam exposure marking device which does not require an expensive f.θlens, and maintains satisfactory irradiating position precision, and easily focused the laser beams (about 1/3 times that of the conventional device), and hardly generates a fluctuation in the cross-sectional shape of the laser beams. SOLUTION: A laser light source device is fixed to a platen, and an X/Y stage is arranged on the platen, and a galvanoscanner is mounted on the X/Y scanner of this X/Y stage. Then, laser beams are made incident from a laser light source 1 through mirrors 2, 3, 12, and 14 on the galvanoscanner.</p> |
