MICROELECTROMECHANICAL SYSTEM SENSOR ASSEMBLY

摘要

A sensor assembly (100) has a substrate (102) with a microchannel (104) form ed therein through which a fluid flows. At least one sensor (106) is proximate to the microchannel. The temperature of the at least one sensor or fluid indicates the condition of the fluid including the flow rate and the presenc e of gas bubbles and particulate substance.