Production of deep trench capacitor comprises patterning substrate having hard mask layer and insulating layer to form trench, thermally treating after doping and forming dielectric capacitor layer and conducting layers

摘要

Production of a deep trench capacitor comprises preparing a substrate having a hard mask layer and an insulating layer; patterning the mask layer and the insulating layer to form a trench with side walls; forming an insulating layer within the trench; forming an intermediate layer made of hard metal on the side walls; removing the insulating layer; forming a doping layer; thermally treating to form a doped region in the substrate, the doped region acting as a storage electrode; forming a dielectric capacitor layer above the storage electrode; forming a first conducting layer to fill the trench and forming a second conducting layer above the first conducting layer.