Verfahren zum Flüssigphasen-Aufwachsen von einer Halbleiterverbindung,申请号DE1992631670T-传众专利搜索

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发明名称	Verfahren zum Flüssigphasen-Aufwachsen von einer Halbleiterverbindung
摘要
申请公布号	DE69231670(T2)	申请公布日期	2001.06.07
申请号	DE1992631670T	申请日期	1992.07.22
申请人	SHIN-ETSU HANDOTAI CO., LTD.	发明人	YANAGISAWA, MUNEHISA;NAKAMURA, AKIO;OTAKI, TOSHIO;HIGUCHI, SUSUMU
分类号	C30B19/00;C30B19/04;C30B19/10;C30B27/00;C30B29/44;H01L21/208	主分类号	C30B19/00
代理机构		代理人
主权项
地址

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