发明名称 |
ADAPTIVE TOLERANCE REFERENCE INSPECTION SYSTEM |
摘要 |
Method and apparatus for automatically optically inspecting electrical circuits by matching portions of an electrical circuit being inspected to corresponding portions in a reference, wherein an adaptive spatial tolerance representing a permissible deviation in the location of corresponding portions is applied to a portion. The spatial tolerances for each portion is in part a function of a characteristic of the portion, for example one or more of: the proximity of the portion to other portions of predetermined type, a spatial location of the portion in an electrical circuit, a material from which the portion is formed, the color of the portion and the intensity of light reflected by the portion. Non-defective matching portions an electrical circuit being inspected and in a reference must be separated by a distance which is less than the adaptive spatial tolerance.
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申请公布号 |
WO0140770(A2) |
申请公布日期 |
2001.06.07 |
申请号 |
WO2000IL00820 |
申请日期 |
2000.12.05 |
申请人 |
ORBOTECH LTD.;ASPIR, DORON;KRAUS, MENAHEM;ORGAD, DROR;NADIVI, JACOB |
发明人 |
ASPIR, DORON;KRAUS, MENAHEM;ORGAD, DROR;NADIVI, JACOB |
分类号 |
G01R31/302;(IPC1-7):G01N21/00 |
主分类号 |
G01R31/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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