发明名称 ADAPTIVE TOLERANCE REFERENCE INSPECTION SYSTEM
摘要 Method and apparatus for automatically optically inspecting electrical circuits by matching portions of an electrical circuit being inspected to corresponding portions in a reference, wherein an adaptive spatial tolerance representing a permissible deviation in the location of corresponding portions is applied to a portion. The spatial tolerances for each portion is in part a function of a characteristic of the portion, for example one or more of: the proximity of the portion to other portions of predetermined type, a spatial location of the portion in an electrical circuit, a material from which the portion is formed, the color of the portion and the intensity of light reflected by the portion. Non-defective matching portions an electrical circuit being inspected and in a reference must be separated by a distance which is less than the adaptive spatial tolerance.
申请公布号 WO0140770(A2) 申请公布日期 2001.06.07
申请号 WO2000IL00820 申请日期 2000.12.05
申请人 ORBOTECH LTD.;ASPIR, DORON;KRAUS, MENAHEM;ORGAD, DROR;NADIVI, JACOB 发明人 ASPIR, DORON;KRAUS, MENAHEM;ORGAD, DROR;NADIVI, JACOB
分类号 G01R31/302;(IPC1-7):G01N21/00 主分类号 G01R31/302
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