ACHROMATIC DIFFRACTIVE OPTICAL MODULATOR

摘要

Micromachined grating modulators which exhibit achromatic behavior are described. One embodiment includes narrow and wide ribbons (120, 130) suspended above a substrate and alternatingly interleaved with each other. Narrow and wide reflective surfaces (122, 132) are formed on the narrow and wide ribbons. Compensating reflective surfaces (142) are formed in the gaps (140) between and beneath the ribbons. The width of the ribbons as well as the width of the gaps and the compensating reflecting surfaces are designed so that incident optical beam can be modulated or attenuated in an achromatic fashion.