| 摘要 |
A multilayer film reflection mirror capable of simply correcting a wavefront phase, and a production method therefor. A reflection mirror using reflectio n by a multilayer film, wherein the multilayer film is formed with a frequency higher than is necessary for a reflection factor to substantially saturate, and is scraped off according to a wavefront phase regulation amount of an outgoing light to thereby regulate a wavefront phase. Since a correction fil m and a multilayer film having a capability beyond a substantial saturation of a reflection factor are formed, correction is possible by scraping off the multilayer film even when a correction-film removing is not sufficient for phase correction, whereby more accurate phase correction is implemented.</SD OAB>
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