| 发明名称 |
Electron beam vaporizer, used for vaporizing aluminum, comprises high temperature container made of electrically-conducting ceramic for receiving vaporized material inserted into liquid-cooled crucible |
| 摘要 |
Electron beam vaporizer comprises a high temperature container (3) made of an electrically conducting ceramic for receiving vaporized material (2) inserted into a liquid-cooled crucible (1).
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| 申请公布号 |
DE19955428(A1) |
申请公布日期 |
2001.06.07 |
| 申请号 |
DE19991055428 |
申请日期 |
1999.11.18 |
| 申请人 |
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. |
发明人 |
UHLIG, HEIN;STOECKL, WIELAND;SCHELER, MICHAEL |
| 分类号 |
C23C14/30;H01J37/305;(IPC1-7):C23C14/30 |
主分类号 |
C23C14/30 |
| 代理机构 |
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代理人 |
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| 地址 |
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