发明名称 APPARATUS FOR MOVING A WORKPIECE
摘要 An improved fluid track for transporting a workpiece is disclosed. The fluid track includes a base having apertures formed therein and rails to guide the workpiece to a desired location. The track is designed such that fluid that flows through the apertures suspends the workpiece above the base of the track. The workpiece is urged in a desired or predetermined direction by applying a fluid (<i>e.g.</i>, through a nozzle) to a surface of the workpiece.
申请公布号 WO0112384(A3) 申请公布日期 2001.06.07
申请号 WO2000US21489 申请日期 2000.08.07
申请人 SPEEDFAM-IPEC CORPORATION 发明人 BLAZEV, ANCO, S.;IRWIN, WAYNE, L.;REKER, MARY, A.
分类号 H01L21/677 主分类号 H01L21/677
代理机构 代理人
主权项
地址