METHOD FOR PRODUCING FUNCTIONAL LAYERS WITH A PLASMA JET SOURCE

摘要

The invention relates to a method for producing a coating on a substrate (12) while using at least one plasma jet source (5) that can be operated in a medium high vacuum range up to the pressure range that is near atmospheric pressure. The plasma jet source (5) produces a plasma (10) which exits the plasma jet source (5) in the form of a plasma jet (17) and which acts upon a substrate (12). At least one precursor material (16, 16') is fed to the plasma (10). Said precursor material is broken up or modified in the plasma jet (17) until it reaches the atomic or molecular level and is subsequently deposited on the substrate (12).