发明名称 BEAM DIVERTING SHUTTER FOR A LASER BEAM
摘要 <p>A shutter mechanism having a slide element coupled to a support base by a plurality of roller bearings journaled between opposing pairs of guide rods is disclosed. The slide element and support base have corresponding beam apertures in alig nment when the shutter is in its open position. Angularly mounted on the slide, ad jacent to the slide's beam aperture, is a UV reflective mirror. when the shutter is co mmended to close, an actuator forces the slide and support base apertures out of ali gnment, while simultaneously positioning the UV reflective mirror into the position previo uslyoccupied by the slide's aperture. A laser beam, prev iously being transmitted through the aligned apertures, will be reflected by the mirror to a beam stop as a d iagnostic instrument mounted on the support base.</p>
申请公布号 CA2183016(C) 申请公布日期 2001.06.05
申请号 CA19962183016 申请日期 1996.08.09
申请人 CYMER LASER TECHNOLOGIES 发明人 DE RUYTER, ANTHONY JOHN;MEANS, DAVID WILLIAM
分类号 G02B26/08;B23K26/42;G02B26/04;H01S3/00;H01S3/101;(IPC1-7):H01S3/02 主分类号 G02B26/08
代理机构 代理人
主权项
地址