| 摘要 |
Disclosed is a vibration gyro sensor comprising an annular frame having an approximately square planar contour with a central opening having an approximately circular planar configuration, an annular section arranged in the opening of the annular frame and having an approximately circular planar contour for constructing a vibrator, and a plurality of resilient sections which span the inner circumference of the annular frame and the outer circumference of the annular section, wherein the annular frame, the annular section, and the plurality of resilient sections are constructed by an integrated fired product made of ceramics. The vibration gyro sensor further comprises piezoelectric/electrostrictive elements (driving piezoelectric/electrostrictive elements and detecting piezoelectric/electrostrictive elements) formed on upper surfaces of the respective resilient sections. Each of the resilient sections has a thickness in its direction of height designed to be smaller than a thickness of the annular section, which is thus thin-walled so that the rigidity in the direction of vibration of the piezoelectric/electrostrictive elements is lowered to give a large amplitude of vibration caused on the annular section (vibrator).
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