MANUFACTURING DEVICE FOR POLYCRYSTALLINE SILICON SHEET AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing device and method of a polycrystalline silicon sheet, which is capable of obtaining the growth form of an excellent crystal and easily stripping the polycrystalline silicon sheet from the surface of a cooling body. SOLUTION: The polycrystalline silicon sheet manufacturing device is composed of a crucible, a heating part for heating a silicon raw material supplied to the crucible and a cooling part for obtaining the polycrystalline silicon sheet by bringing a molten liquid of the raw material melted by being heated into contact with the surface of the cooling body to grow the crystal of silicon and the surface of the cooling body is composed of a sheet sticking part for depositing the sheet obtained by forming the crystallization starting point on the surface of the cooling body and growing the crystal and a sheet stripping part having a surface from which the sheet is stripped.