METHOD OF LASER BEAM MACHINING FOR CERAMIC MATERIAL

摘要

PROBLEM TO BE SOLVED: To provide a method of a machining of ceramic material by which method a strain is given without causing a crack even when a defect exists inside. SOLUTION: In the machining method where a strain is given by irradiating a ceramic plate 11 with a pulsed laser beam emitted from a YAG pulse laser beam oscillator 10, a crack of the ceramic plate is prevented by making a pulse width of the pulsed laser beam 1 ns to 0.4 ms.