发明名称 |
Double pass etalon spectrometer |
摘要 |
A double pass etalon based spectrometer. Spectral components of a diffused beam are angularly separated as they are transmitted through an etalon. A retroreflector reflects the transmitted components back through the etalon. Twice transmitted spectral components are focused onto a light detector which in a preferred embodiment is a photo diode array. The spectrometer is very compact producing precise fringe data permitting bandwidth measurements with precision needed for microlithography for both DELTAlambdFWHM and DELTAlambd95%.
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申请公布号 |
US6243170(B1) |
申请公布日期 |
2001.06.05 |
申请号 |
US19990245134 |
申请日期 |
1999.02.04 |
申请人 |
CYMER, INC. |
发明人 |
ERSHOV ALEXANDER I. |
分类号 |
G01J3/26;G01B9/02;G01J1/00;G01J3/00;G01J3/02;G01J3/12;G01J3/28;(IPC1-7):G01B9/02 |
主分类号 |
G01J3/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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